Method for high volume manufacture of electrochemical cells using physical vapor deposition

ABSTRACT

Embodiments of the present invention relate to apparatuses and methods for fabricating electrochemical cells. One embodiment of the present invention comprises a single chamber configurable to deposit different materials on a substrate spooled between two reels. In one embodiment, the substrate is moved in the same direction around the reels, with conditions within the chamber periodically changed to result in the continuous build-up of deposited material over time. Another embodiment employs alternating a direction of movement of the substrate around the reels, with conditions in the chamber differing with each change in direction to result in the sequential build-up of deposited material over time. The chamber is equipped with different sources of energy and materials to allow the deposition of the different layers of the electrochemical cell.

CROSS-REFERENCES TO RELATED APPLICATIONS

This application claims the benefit of U.S. Provisional PatentApplication No. 61/074,448, filed Jun. 20, 2008, entitled “Method forHigh Volume Manufacture of Electrochemical Cells Using Physical VaporDeposition,” the contents of which is hereby incorporated by referencein its entirety.

BACKGROUND OF THE INVENTION

Electrochemical cells are finding ever-increasing use as power suppliesfor a large number of different applications. Examples of devicescommonly run off of battery power include but are not limited to mobileelectronic devices such as cell phones, laptop computers, and portablemedia players. The demand for increased power by these devices hasresulted in the fabrication of electrochemical cells from a variety ofmaterials arranged in different architectures.

Conventional approaches to the fabrication of electrochemical cells haveformed the elements of an electrochemical cell (such as the anode,cathode, and electrolytic material) by depositing a series of layers.Commonly, these electrochemical cells are fabricated utilizing batchprocesses, utilizing separate chambers to deposit different layers.

U.S. Pat. No. 5,411,592 describes an apparatus for the formation ofthin-film batteries utilizing a substrate that is moved between tworolls. By rotating the rolls, the substrate is moved through a pluralityof chambers, in which a film is deposited.

While the approach of the U.S. Pat. No. 5,411,592 may be effective tofabricate an electrochemical cell, it may offer certain disadvantages.One possible disadvantage is bulk, in that each of the films making upthe electrochemical cell must be formed in a separate chamber. Byallocating each fabrication step to a different chamber, the size of theapparatus is increased.

Moreover, by allocating the formation of each layer of theelectrochemical cell to a different chamber, the apparatus of U.S. Pat.No. 5,411,592 may suffer from a lack of flexibility. Specifically, achange in the structure of the electrochemical cell requires a newdevice with different chambers to be created. Where batteries are to beformed from different materials or with different architectures, theconventional batch-type apparatuses may be impractical.

From the above, it is seen that cost effective and efficient techniquesfor manufacturing of semiconductor materials are desirable.

SUMMARY OF THE INVENTION

Embodiments of the present invention relate to apparatuses and methodsfor fabricating electrochemical cells. One embodiment of the presentinvention comprises a single chamber configurable to deposit differentmaterials on a substrate spooled between two reels. In one embodiment,the substrate is moved in the same direction around the reels, withconditions within the chamber periodically changed to result in thecontinuous build-up of deposited material over time. Another embodimentemploys alternating a direction of movement of the substrate around thereels, with conditions in the chamber differing with each change indirection to result in the sequential build-up of deposited materialover time. The chamber is equipped with different sources of energy andmaterials to allow the deposition of the different layers of theelectrochemical cell.

According to an embodiment of the present invention, an apparatus fordeposition of electrochemical cells is provided. The apparatus includesa deposition chamber in fluid communication with a first material sourceand with a second material source, a first gate in fluid communicationwith the deposition chamber and configured to be maintained under gasand pressure conditions similar to conditions within the depositionchamber, and a second gate in fluid communication with the depositionchamber and configured to be maintained under gas and pressureconditions similar to conditions within the deposition chamber. Asubstrate is positioned between two reels and extending through thefirst gate, the deposition chamber, and the second gate, and acontroller is configured to rotate the reels in concert to move thesubstrate in a direction through the deposition chamber while materialfrom the material source is deposited on the substrate.

According to another embodiment of the present invention, a process forforming an electrochemical cell is provided. The process includes movinga substrate spooled between two reels in a first direction through adeposition chamber, depositing an anode or a cathode layer on thesubstrate in the chamber under a first set of deposition conditions, andmoving the anode or cathode layer back into the chamber. An electrolytelayer is deposited over the anode or cathode layer within the chamberunder a second set of deposition condition. The electrolyte layer ismoved back into the chamber, and an other of the anode or cathode layeris deposited over the electrolyte layer within the chamber under a thirdset of deposition conditions, to form the electrochemical cell.

According to a specific embodiment of the present invention, anapparatus for forming an electrochemical cell is provided. The apparatusincludes a substrate spooled between two reels through a depositionchamber, a controller in electronic communication with the reels and thedeposition chamber, and a computer-readable storage medium in electroniccommunication with the controller. The computer readable storage mediumhas stored thereon, code directed to instruct the controller to move asubstrate through the deposition chamber in a first direction, instructthe deposition chamber to deposit an anode or a cathode layer on thesubstrate in the chamber under a first set of deposition conditions, andinstruct the reels to move the anode or cathode layer back into thechamber. Code stored on the computer-readable storage medium instructsthe deposition chamber to deposit an electrolyte layer over the anode orcathode layer within the chamber under a second set of depositioncondition, instructs the reels to move the electrolyte layer back intothe chamber; and instructs the deposition chamber to deposit an other ofthe anode or cathode layer over the electrolyte layer within the chamberunder a third set of deposition conditions, to form the electrochemicalcell.

According to another specific embodiment of the present invention, amethod for depositing material on a substrate is provided. The methodincludes passing materials through evaporation sources for heating toprovide a vapor using at least one method selected from the groupconsisting of evaporation, physical vapor deposition, chemical vapordeposition, sputtering, radio frequency magnetron sputtering, microwaveplasma enhanced chemical vapor deposition (MPECVD), pulsed laserdeposition (PLD), laser ablation, spray deposition, spray pyrolysis,spray coating or plasma spraying. Oxygen gas or other oxidizing speciesis passed into the evaporation chamber to mix with the material vaporand create an oxide to be deposited. Nitrogen gas or other species ispassed into the evaporation chamber to mix with the material vapor andcreate a nitrate to be deposited, and a substrate is conveyed adjacentthe evaporation sources for deposition of the vapor onto the substrate.

Further understanding of the nature and advantages of the presentinvention may be realized by reference to the latter portions of thespecification and attached drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a simplified schematic diagram illustrating an apparatus fordepositing battery material onto a substrate according to an embodimentof the present invention.

FIG. 2 is a simplified view of a particular embodiment of an apparatusin accordance with the present invention.

FIG. 2A is a simplified flow diagram showing steps of an embodiment of aprocess for forming an electrochemical cell utilizing the apparatus ofFIG. 2.

FIG. 2B is a simplified view of an alternative embodiment of anapparatus in accordance with the present invention.

FIG. 2C is a simplified flow diagram showing steps of an embodiment of aprocess for forming an electrochemical cell utilizing the apparatus ofFIG. 2B.

FIG. 3A shows an example of a battery in a wound prismatic form.

FIG. 3B shows an example of a battery in a wound cylindrical form.

FIG. 4 shows the location of an electrochemical cells formed on a coiledsubstrate in accordance with one embodiment.

FIG. 5 shows an example of plurality of discrete electrochemical cellson a substrate and connected by leads.

FIG. 6A is a simplified cross-sectional view showing an electrochemicalcell formed according to an embodiment of the present invention havingelectrodes with a flat thin-film morphological design.

FIG. 6B is a simplified cross-sectional view showing an electrochemicalcell formed according to an embodiment of the present invention havingelectrodes with a sinusoidal shaped morphological design.

FIG. 7 is a simplified cross-sectional view showing an embodiment of astacked electrochemical cell formed according to an embodiment of thepresent invention.

DETAILED DESCRIPTION OF SPECIFIC EMBODIMENTS

Embodiments in accordance with the present invention relate totechniques for manufacturing electrochemical cells. FIG. 1 is asimplified schematic diagram illustrating an apparatus for depositingbattery material onto a substrate according to an embodiment of thepresent invention.

In particular, the apparatus of FIG. 1 comprises a vacuum depositionchamber 6. The vacuum deposition chamber is configured to deposit thinfilms of materials making up an electrochemical cell. In particular, thevacuum deposition chamber is in fluid communication with a plurality ofmaterial sources allowing deposition of one or more of the followinglayers: an anode, a cathode, an electrolyte, a current collector, and alead connecting one or more discrete electrochemical cells.

Specifically, the vacuum deposition chamber is configured to have atleast one evaporation source to deposit a layer of battery cathodematerial onto a current collector. The current collector may be providedon the substrate ready-made, or may itself be formed utilizing thedeposition chamber.

The deposition chamber is also configured to have at least oneevaporation source to deposit a layer of electrolyte material onto thecathode battery material. The electrolyte material may be deposited as agel or in the solid-state. The deposition chamber is also configured tohave at least one evaporation source to deposit a layer of battery anodematerial onto the electrolyte layer.

The deposition chamber is provided with input and output gas gates 4 and9 respectively. These gas gates maintain an inert or oxidizing vacuumatmosphere in the chamber during deposition.

FIG. 2 shows a more detailed view of an embodiment of an apparatus inaccordance with the present invention. As shown in FIG. 2, oneembodiment of the present invention comprises a processing chamberconfigurable to deposit different materials on a substrate spooledbetween two reels.

The apparatus may include a gas supply such that an oxidizing atmospherecan be maintained as needed at the same time of deposition. A gas supplyvalve connected to the deposition chamber, may allow a reactive gasatmosphere to be maintained as needed at the same time of deposition.Another gas supply valve, connected to the deposition chamber, may allowan inert gas atmosphere to be maintained in the chamber while theprocessed substrate is moved out of the chamber.

The chamber is equipped with different sources of energy and materialsto allow the deposition of the different layers of the electrochemicalcell. For example, the chamber may be equipped with heating or coolingelements to control the thermal environment therein. These temperaturecontrol elements may be global, for example in the form of heat lamps orpeltier heaters or coolers. Alternatively, or in conjunction with globalheat sources/sinks, the apparatus may be equipped with localizedtemperature control elements, such as lasers or jets of cryogenicfluids, that are able to be directed at specific portions of thedeposited materials.

The chamber may also be equipped to expose the materials therein toradiation. Examples of radiation sources in accordance with the presentinvention include but are not limited to UV radiation sources, microwaveradiation sources, and electron beams. Other possible sources ofradiation for use in the chamber include infrared radiation sources,pulsed lasers, nanosecond lasers, low energy lasers (for example havinga power on the order of mJ/cm²) and high energy lasers (for examplehaving a power on the order of J/cm²), and neutron, electrons, photonsor other atomic particles scattering.

The apparatus includes a supply chamber connected in series with thedeposition chamber. A substrate material is fed to the depositionchamber. The substrate material is kept in the same gas atmosphere ofthe deposition chamber and it is unrolled and passed to the depositionchamber continuously or sequentially.

The input/output gates may comprise evacuation chambers connected inseries with the deposition chamber and kept at the same gas atmosphere.The substrate material, upon which the battery has been deposited,passes through the evacuation chamber and is collected in a roll.

This embodiment of the apparatus can be adapted to deposit a stack ofsolid state battery cells onto the substrate. In this embodiment, thesupply and evacuation chambers are reversible. Therefore, when the rollof substrate material has undergone one pass through the depositionchamber, the direction of the substrate can be reversed and thesubstrate passed through the deposition chamber again to allow formationof another layer of the electrochemical cell.

Thus, in the particular embodiment shown in FIG. 2, a direction ofmovement of the substrate around the reels is alternated. Conditionswithin the chamber are varied with each change in direction, in order toresult in the sequential build-up of deposited material over time. Inparticular, a controller is in electrical communication with each of thereels and the chamber. The controller is also in communication with acomputer readable storage medium, having stored thereon code configuredto direct the alternating movement of the substrate in conjunction withdeposition of the different layers of material of the electrochemicalcell.

FIG. 2A is a simplified diagram showing the steps of a process flow 200of forming a battery structure utilizing this approach. Specifically, ina first step 201, the reels are rotated to move a substrate in a firstdirection through the deposition chamber.

In a second step 202, the current collector material is deposited on thesubstrate if the substrate is not electrically conducting. In a thirdstep 203, the material of a first electrode is deposited on thesubstrate. In certain embodiments, the material of the anode isdeposited first. In other embodiments, the material of the cathode maybe deposited first.

In a fourth step 204, the direction of rotation of the reels is changed,and the substrate bearing the deposited electrode material is moved inthe opposite direction back through the chamber. In fifth step 205, thematerial of the electrolyte is deposited over the first electrode.

In a sixth step 206, the direction of rotation of the reels is againreversed to the original direction, and the substrate bearing thedeposited electrolyte material is again moved back through the chamber.In seventh step 207, the material of the second electrode (anode orcathode) is deposited over the electrolyte. In an eighth step 208, thematerial of the current collector is deposited on the second electrode.

The above sequence of steps provides a process according to anembodiment of the present invention. As shown, the method uses acombination of steps including a changes in direction of the movement ofthe substrate through the chamber, coupled with changes in depositionconditions within the chamber. Other alternatives can also be providedwhere steps are added, one or more steps are removed, or one or moresteps are provided in a different sequence without departing from thescope of the claims herein. Further details of the present method can befound throughout the present specification.

In an alternative approach, the substrate may be moved in the samedirection around the reels, with conditions within the chamberperiodically changed to result in the continuous build-up of depositedmaterial over time. FIG. 2B shows a simplified schematic view of anembodiment of an apparatus configured to form a battery structureaccording to such an approach. In particular, a controller is inelectrical communication with the reels and the deposition chamber. Thecontroller is also in communication with a computer readable storagemedium having stored thereon code to direct the controller toconsistently rotate the reels in the same direction to first form anelectrode layer. After a certain amount of time when the substrate iscovered with the electrode layer, code stored on the computer readablestorage medium causes the controller to instruct the chamber to changethe deposition conditions to deposit an electrolyte layer. Subsequently,the controller instructs the deposition chamber to change conditionswithin the chamber yet again to deposit the material of the other of theelectrodes (anode or cathode).

FIG. 2C is a simplified chart summarizing the flow 220 of steps offorming a battery structure utilizing this approach. In a first step222, the reels are rotated to move the substrate through the chamber. Ina second step 223, while the reels are being rotated in the samedirection, a current collector material is deposited on the substrate ifthe substrate is not electrically conducting.

In a third step 224, while the reels are being rotated in the samedirection, an electrode material (anode or cathode) is deposited on thesubstrate, or the current collector material if the substrate isnon-conducting. In a fourth step 226, once the substrate has beencovered with the electrode material, conditions within the chamber arechanged to deposit an electrolyte material on the electrode.

In a fifth step 228, once the first electrode material has been coveredwith the electrolyte, conditions within the chamber are again changedand a second (cathode or anode) material is deposited. In a sixth step229, the current collector material is deposited on the secondelectrode.

The above sequence of steps provides a process according to anembodiment of the present invention. As shown, the method uses acombination of steps including movement of the substrate through thechamber in a consistent direction, coupled with changes in depositionconditions within the chamber. Other alternatives can also be providedwhere steps are added, one or more steps are removed, or one or moresteps are provided in a different sequence without departing from thescope of the claims herein. Further details of the present method can befound throughout the present specification.

The deposition chamber may be configured to deposit materials by atleast one method selected from evaporation, physical vapor deposition(PVD), chemical vapor deposition (CVD), sputtering, radio frequencymagnetron sputtering, microwave plasma enhanced chemical vapordeposition (MPECVD), pulsed laser deposition (PLD), laser ablation,spray deposition, spray pyrolysis, spray coating, or plasma spraying.

Conditions for deposition may, but need not, take place in a reducedpressure environment. Thus, the deposition chamber may be the depositionchamber may be configured to deposit materials by at least one

In particular embodiments, the apparatus is configured to depositmaterials utilizing microwave hydrothermal synthesis to createnanoparticles. Nanoparticles deposited according to embodiments of thepresent invention may exhibit at least one of the shapes selected fromthe group consisting of: spheres, nanocubes, pseudocubes, ellipsoids,spindles, nanosheets, nanorings, nanospheres, nanospindles, dots, rods,wires, arrays, tubes, nanotubes, belts, disks, rings, cubes, mesopores,dendrites, propellers, flowers, hollow interiors, hybrids of the listedstructures, and other complex superstructures. Particular embodiment ofapparatuses according to the present invention can be configured todeposit particles using microwave exposure to induce at least one of thefollowing mechanisms: nucleation, aggregation, recrystallization, anddissolution-recrystallization.

In particular embodiments, the apparatus may be configured to depositmaterials utilizing laser ablation, thermal evaporation, vaportransport, or a combination of these techniques, to deposit nanowire,nanotube, or nanobelt structures, or a combination of them. Thematerials that can be deposited in these embodiments include, but arenot limited to, Group III-IV semiconductor nanowires (e.g. silicon),zinc (Zn) and zinc oxide (ZnO) nanowires, nanobelts of semiconductingoxides (oxides of zinc, tin, indium, cadmium, and gallium), carbonnanotubes and carbon meso-structures.

Embodiments of the present invention may offer a number of benefits overconventional approaches. For example, embodiments of the presentinvention facilitate the scalable manufacture of single or multiple,high-performance, thin-film electrochemical cells, particularly ascompared with conventional batch-type manufacturing processes.

Embodiments of the present invention also offer a high degree offlexibility as compared with conventional approaches. In particular,embodiments of the present invention allow multiple manufacturingtechniques to be employed utilizing a single chamber. This approachcreates a system that is capable of utilizing multiple depositiontechniques specific to optimized layers or graded materials, within oneor multiple cells.

Certain embodiments of the present invention allow for the fabricationof a plurality of electrochemical cells in a vertical (stacked)configuration. Thus, particular embodiments of the present invention mayalso include at least one evaporation source adapted to deposit currentcollector layers between the second electrode of a first depositedbattery and the first electrode of the next deposited battery in astack, and also a top conductive metal layer upon the second electrodeof the last deposited battery in a stack.

Alternatively, embodiments of the present invention may allow for thehorizontal formation of batteries/electrochemical cells on a ribbon-typesubstrate. In particular embodiments, such a ribbon may be coiled in awound prismatic form, as is shown in FIG. 3A. In alternativeembodiments, such a ribbon may be coiled in a wound cylindrical form, asis shown in FIG. 3B.

As shown in FIG. 4, in certain embodiments the deposition of materialson the substrate may be limited to particular locations. In particular,deposited materials may be excluded from portions of the substrateexpected to be the location of a sharp turn in the coil, therebyavoiding high stresses and possible defects associated with winding.

In particular embodiments, a plurality of electrochemical cells may beformed in a horizontal series on a ribbon-type substrate, withelectrical communication between the discrete electrochemical cellsestablished through conducting lead structures. Such a embodiment isshown in FIG. 5.

Where such leads are relatively thin and fragile, the tight turns of acoil could impose physical stress on them, possibly resulting infracture. Accordingly, particular embodiments of the present inventionmay space the discrete batteries/cells with increasing spacing. Suchspacing would accommodate a larger amount of material in successiveturns as the material is wound, reducing physical stress.

EXAMPLES Example 1 Manufacture of a Thin-Film Li Battery

This example demonstrates the process of manufacturing a newelectrochemical cell. In particular, two different morphological designsof electrodes are shown. FIG. 6A is a simplified cross-sectional viewshowing an electrochemical cell formed according to an embodiment of thepresent invention having electrodes with a flat thin-film morphologicaldesign. FIG. 6B is a simplified cross-sectional view showing anelectrochemical cell formed according to an embodiment of the presentinvention having electrodes with a sinusoidal shaped morphologicaldesign.

The materials for the three-dimensional electrochemical cells are copperas anode current collector (16 in FIG. 6A, 21 in FIG. 6B), lithium metalas anode (17 in FIG. 6A, 22 in FIG. 6B), polymer with lithium salts asthe electrolyte (18 in FIG. 6A, 23 in FIG. 6B), lithium manganese oxideas cathode (19 in FIG. 6A, 24 in FIG. 6B), and aluminum as cathodecurrent collector (20 in FIG. 6A, 25 in FIG. 6B). Because a polymerelectrolyte is used, a separator is unnecessary.

These materials used here are for illustrative purposes only. Inaccordance with alternative embodiments, other materials could be usedto form the electrochemical cell and still remain within the scope ofthe present invention.

In the flat electrode configuration of FIG. 6A, the substrate is thefirst current collector (copper). Successive layers of materials, activeand inactive, are deposited via PVD on the substrate in the depositionchamber.

In the sinusoidal configuration, a ridged polymeric film is used as thesubstrate. A first metallic layer (copper) is deposited on thesubstrate, followed by successive layers of materials, active andinactive, which are deposited via PVD in the chamber.

Example 2 Manufacture of a Stacked Set of Cells, Producing a HigherVoltage, and Energy, Battery

This example demonstrates the process of manufacturing a stacked cell.FIG. 6 shows two flat thin-film cells stacked together. The materialsfor the three-dimensional electrochemical cells are copper as anodecurrent collector (26 and 31), lithium metal as anode (27 and 32),polymer with lithium salts as the electrolyte (28 and 33), lithiummanganese oxide as cathode (29 and 34), and aluminum as cathode currentcollector (30 and 35). Because a polymer electrolyte is used, aseparator is not required.

The particular materials listed here are for illustrative purposes only.Other materials could be employed by alternative embodiments and stillremain within the scope of the present invention.

In this particular example, multiple layers are deposited in sequenceusing the first flat metallic layer (copper current collector) as thesubstrate. PVD is used to deposit the successive active and inactivematerials.

While the above-embodiments describe electrochemical cells fabricatedfrom particular materials, the present invention is not limited to theuse of such materials. Alternative embodiments could deposit a widevariety of deposited materials for the anode, electrolyte, and cathode,and remain within the scope of the present invention. For example, TABLE1 is a non-exhaustive list of examples of the materials making upvarious types of electrolytic cells.

TABLE 1 CURRENT SUBSTRATE ANODE ELECTROLYTE CATHODE COLLECTOR LEADcopper (Cu) foil graphite (C) lithium phosphorus layered metal oxidealuminum (Al) copper oxynitride (LIPON) materials (Cu) (e.g. LiCoO₂)copper (Cu) foil graphite (C) lithium phosphorus spinel materialsaluminum (Al) copper oxynitride (LIPON) (e.g. LiMn₂O₄) (Cu) copper (Cu)foil graphite (C) lithium phosphorus olivine materials aluminum (Al)copper oxynitride (LIPON) (e.g. LiFePO₄) (Cu) copper (Cu) foil graphite(C) lithium phosphorus Li(Ni_(1/3)Mn_(1/3)Co_(1/3))O₂ aluminum (Al)copper oxynitride (LIPON) (Cu) copper (Cu) foil graphite (C) lithiumphosphorus LiNi_(x)Co_(y)Al_((1−x−y))O₂ aluminum (Al) copper oxynitride(LIPON) (NCA) (Cu) copper (Cu) foil graphite (C) lithium phosphorusLiNi_(x)Mn_(y)Co_((1−x−y))O₂ aluminum (Al) copper oxynitride (LIPON)(NCM) (Cu) copper (Cu) foil meso- lithium phosphorus layered metal oxidealuminum (Al) copper carbon (C) oxynitride (LIPON) materials (Cu) (e.g.LiCoO₂) copper (Cu) foil meso- lithium phosphorus spinel materialsaluminum (Al) copper carbon (C) oxynitride (LIPON) (e.g. LiMn₂O₄) (Cu)copper (Cu) foil meso- lithium phosphorus olivine materials aluminum(Al) copper carbon (C) oxynitride (LIPON) (e.g. LiFePO₄) (Cu) copper(Cu) foil meso- lithium phosphorus Li(Ni_(1/3)Mn_(1/3)Co_(1/3))O₂aluminum (Al) copper carbon (C) oxynitride (LIPON) (Cu) copper (Cu) foilmeso- lithium phosphorus LiNi_(x)Co_(y)Al_((1−x−y))O₂ (NCA) aluminum(Al) copper carbon (C) oxynitride (LIPON) (Cu) copper (Cu) foil meso-lithium phosphorus LiNi_(x)Mn_(y)Co_((1−x−y))O₂ aluminum (Al) coppercarbon (C) oxynitride (LIPON) (NCM) (Cu) copper (Cu) foil lithiumlithium phosphorus layered metal oxide aluminum (Al) copper titaniumoxynitride (LIPON) materials (Cu) oxide (e.g. LiCoO₂) (Li₄Ti₅O₁₂) copper(Cu) foil lithium lithium phosphorus spinel materials aluminum (Al)copper titanium oxynitride (LIPON) (e.g. LiMn₂O₄) (Cu) oxide (Li₄Ti₅O₁₂)copper (Cu) foil lithium lithium phosphorus olivine materials aluminum(Al) copper titanium oxynitride (LIPON) (e.g. LiFePO₄) (Cu) oxide(Li₄Ti₅O₁₂) copper (Cu) foil lithium lithium phosphorusLi(Ni_(1/3)Mn_(1/3)Co_(1/3))O₂ aluminum (Al) copper titanium oxynitride(LIPON) (Cu) oxide (Li₄Ti₅O₁₂) copper (Cu) foil lithium lithiumphosphorus LiNi_(x)Co_(y)Al_((1−x−y))O₂ (NCA) aluminum (Al) coppertitanium oxynitride (LIPON) (Cu) oxide (Li₄Ti₅O₁₂) copper (Cu) foillithium lithium phosphorus LiNi_(x)Mn_(y)Co_((1−x−y))O₂ aluminum (Al)copper titanium oxynitride (LIPON) (NCM) (Cu) oxide (Li₄Ti₅O₁₂) copper(Cu) foil lithium lithium phosphorus layered metal oxide aluminum (Al)copper metal (Li) oxynitride (LIPON) materials (Cu) (e.g. LiCoO₂) copper(Cu) foil lithium lithium phosphorus spinel materials aluminum (Al)copper metal (Li) oxynitride (LIPON) (e.g. LiMn₂O₄) (Cu) copper (Cu)foil lithium lithium phosphorus olivine materials aluminum (Al) coppermetal (Li) oxynitride (LIPON) (e.g. LiFePO₄) (Cu) copper (Cu) foillithium lithium phosphorus Li(Ni_(1/3)Mn_(1/3)Co_(1/3))O₂ aluminum (Al)copper metal (Li) oxynitride (LIPON) (Cu) copper (Cu) foil lithiumlithium phosphorus LiNi_(x)Co_(y)Al_((1−x−y))O₂ (NCA) aluminum (Al)copper metal (Li) oxynitride (LIPON) (Cu) copper (Cu) foil lithiumlithium phosphorus LiNi_(x)Mn_(y)Co_((1−x−y))O₂ aluminum (Al) coppermetal (Li) oxynitride (LIPON) (NCM) (Cu) copper (Cu) foil graphite (C)lithium salts/poly- layered metal oxide aluminum (Al) copper ethyleneoxide (PEO), materials (Cu) lithium salts/poly- (e.g. LiCoO₂) vinylidenefluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil graphite (C)lithium salts/poly- spinel materials aluminum (Al) copper ethylene oxide(PEO), (e.g. LiMn₂O₄) (Cu) lithium salts/poly- vinylidene fluoride(PVDF), lithium salts/PEO/PVDF copper (Cu) foil graphite (C) lithiumsalts/poly- olivine materials aluminum (Al) copper ethylene oxide (PEO),(e.g. LiFePO₄) (Cu) lithium salts/poly- vinylidene fluoride (PVDF),lithium salts/PEO/PVDF copper (Cu) foil graphite (C) lithium salts/poly-Li(Ni_(1/3)Mn_(1/3)Co_(1/3))O₂ aluminum (Al) copper ethylene oxide(PEO), (Cu) lithium salts/poly- vinylidene fluoride (PVDF), lithiumsalts/PEO/PVDF copper (Cu) foil graphite (C) lithium salts/poly-LiNi_(x)Co_(y)Al_((1−x−y))O₂ (NCA) aluminum (Al) copper ethylene oxide(PEO), (Cu) lithium salts/poly- vinylidene fluoride (PVDF), lithiumsalts/PEO/PVDF copper (Cu) foil graphite (C) lithium salts/poly-LiNi_(x)Mn_(y)Co_((1−x−y))O₂ aluminum (Al) copper ethylene oxide (PEO),(NCM) (Cu) lithium salts/poly- vinylidene fluoride (PVDF), lithiumsalts/PEO/PVDF copper (Cu) foil meso- lithium salts/poly- layered metaloxide aluminum (Al) copper carbon (C) ethylene oxide (PEO), materials(Cu) lithium salts/poly- (e.g. LiCoO₂) vinylidene fluoride (PVDF),lithium salts/PEO/PVDF copper (Cu) foil meso- lithium salts/poly- spinelmaterials aluminum (Al) copper carbon (C) ethylene oxide (PEO), (e.g.LiMn₂O₄) (Cu) lithium salts/poly- vinylidene fluoride (PVDF), lithiumsalts/PEO/PVDF copper (Cu) foil meso- lithium salts/poly- olivinematerials aluminum (Al) copper carbon (C) ethylene oxide (PEO), (e.g.LiFePO₄) (Cu) lithium salts/poly- vinylidene fluoride (PVDF), lithiumsalts/PEO/PVDF copper (Cu) foil meso- lithium salts/poly-Li(Ni_(1/3)Mn_(1/3)Co_(1/3))O₂ aluminum (Al) copper carbon (C) ethyleneoxide (PEO), (Cu) lithium salts/poly- vinylidene fluoride (PVDF),lithium salts/PEO/PVDF copper (Cu) foil meso- lithium salts/poly-LiNi_(x)Co_(y)Al_((1−x−y))O₂ (NCA) aluminum (Al) copper carbon (C)ethylene oxide (PEO), (Cu) lithium salts/poly- vinylidene fluoride(PVDF), lithium salts/PEO/PVDF copper (Cu) foil meso- lithiumsalts/poly- LiNi_(x)Mn_(y)Co_((1−x−y))O₂ aluminum (Al) copper carbon (C)ethylene oxide (PEO), (NCM) (Cu) lithium salts/poly- vinylidene fluoride(PVDF), lithium salts/PEO/PVDF copper (Cu) foil lithium lithiumsalts/poly- layered metal oxide aluminum (Al) copper titanium ethyleneoxide (PEO), materials (e.g. (Cu) oxide lithium salts/poly- LiCoO₂)(Li₄Ti₅O₁₂) vinylidene fluoride (PVDF), lithium salts/PEO/PVDF copper(Cu) foil lithium lithium salts/poly- spinel materials (e.g. aluminum(Al) copper titanium ethylene oxide (PEO), LiMn₂O₄) (Cu) oxide lithiumsalts/poly- (Li₄Ti₅O₁₂) vinylidene fluoride (PVDF), lithiumsalts/PEO/PVDF copper (Cu) foil lithium lithium salts/poly- olivinematerials (e.g. aluminum (Al) copper titanium ethylene oxide (PEO),LiFePO₄) (Cu) oxide lithium salts/poly- (Li₄Ti₅O₁₂) vinylidene fluoride(PVDF), lithium salts/PEO/PVDF copper (Cu) foil lithium lithiumsalts/poly- Li(Ni_(1/3)Mn_(1/3)Co_(1/3))O₂ aluminum (Al) copper titaniumethylene oxide (PEO), (Cu) oxide lithium salts/poly- (Li₄Ti₅O₁₂)vinylidene fluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foillithium lithium salts/poly- LiNi_(x)Co_(y)Al_((1−x−y))O₂ (NCA) aluminum(Al) copper titanium ethylene oxide (PEO), (Cu) oxide lithiumsalts/poly- (Li₄Ti₅O₁₂) vinylidene fluoride (PVDF), lithiumsalts/PEO/PVDF copper (Cu) foil lithium lithium salts/poly-LiNi_(x)Mn_(y)Co_((1−x−y))O₂ aluminum (Al) copper titanium ethyleneoxide (PEO), (NCM) (Cu) oxide lithium salts/poly- (Li₄Ti₅O₁₂) vinylidenefluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil lithium lithiumsalts/poly- layered metal oxide aluminum (Al) copper metal (Li) ethyleneoxide (PEO), materials (Cu) lithium salts/poly- (e.g. LiCoO₂) vinylidenefluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil lithium lithiumsalts/poly- spinel materials aluminum (Al) copper metal (Li) ethyleneoxide (PEO), (e.g. LiMn₂O₄) (Cu) lithium salts/poly- vinylidene fluoride(PVDF), lithium salts/PEO/PVDF copper (Cu) foil lithium lithiumsalts/poly- olivine materials aluminum (Al) copper metal (Li) ethyleneoxide (PEO), (e.g. LiFePO₄) (Cu) lithium salts/poly- vinylidene fluoride(PVDF), lithium salts/PEO/PVDF copper (Cu) foil lithium lithiumsalts/poly- Li(Ni_(1/3)Mn_(1/3)Co_(1/3))O₂ aluminum (Al) copper metal(Li) ethylene oxide (PEO), (Cu) lithium salts/poly- vinylidene fluoride(PVDF), lithium salts/PEO/PVDF copper (Cu) foil lithium lithiumsalts/poly- LiNi_(x)Co_(y)Al_((1−x−y))O₂ (NCA) aluminum (Al) coppermetal (Li) ethylene oxide (PEO), (Cu) lithium salts/poly- vinylidenefluoride (PVDF), lithium salts/PEO/PVDF copper (Cu) foil lithium lithiumsalts/poly- LiNi_(x)Mn_(y)Co_((1−x−y))O₂ aluminum (Al) copper metal (Li)ethylene oxide (PEO), (NCM) (Cu) lithium salts/poly- vinylidene fluoride(PVDF), lithium salts/PEO/PVDF

It is further understood that the examples and embodiments describedherein are for illustrative purposes only and that various modificationsor changes in light thereof will be suggested to persons skilled in theart and are to be included within the spirit and purview of thisapplication and scope of the appended claims.

What is claimed is:
 1. An apparatus for deposition of electrochemicalcells for battery devices, the apparatus comprising: a single depositionchamber comprising a first material source configured to deposit a firstmaterial, the first material source being configured to deposit an anodematerial or a cathode material, the first material source being at leastone of a metal oxide source, a metal phosphate source, a lithium metalsource, or a lithium metal alloy source, and with a second materialsource configured to deposit a second material, the second materialsource being configured to deposit an electrolyte, the second materialsource being a lithium phosphorous compound source or a polymericmaterial source; a first gate comprising a first evacuation chamber influid communication with the single deposition chamber and configured tobe maintained under gas and pressure conditions similar to conditionswithin the single deposition chamber; a second gate comprising a secondevacuation chamber in fluid communication with the single depositionchamber and configured to be maintained under gas and pressureconditions similar to the conditions within the single depositionchamber; a substrate positioned between two reels and extending throughthe first gate, the single deposition chamber, and the second gate; anda controller, in electronic communication with a non-transitory computerreadable medium, programmed to move the substrate in alternatingdirections through the single deposition chamber and to instruct thesingle deposition chamber to deposit on the substrate an electrode fromthe first material derived from the first material source when thesubstrate is moved in a first direction, and then to deposit on theelectrode an electrolyte from the second material derived from thesecond material source when the substrate is moved in a second directionto form a single, discrete electrochemical cell; the controller isprogrammed to continue to move the substrate in alternating directionsand to instruct the single deposition chamber to form otherelectrochemical cells overlying the single, discrete electrochemicalcell to form a stacked configuration comprising the single, discreteelectrochemical cell and the other, overlying electrochemical cells,wherein the controller is programmed to form at least two otherelectrochemical cells in addition to the single, discreteelectrochemical cell, each discrete electrochemical cell being spacedapart from the other discrete electrochemical cells along a length ofthe substrate, and wherein the controller is programmed to increase thespacing between each successive pair of electrochemical cells along thelength of the substrate.
 2. The apparatus of claim 1 wherein the chamberis configured to perform deposition utilizing one or a combination ofmethods selected from the group consisting of evaporation, physicalvapor deposition (PVD), chemical vapor deposition, sputtering, radiofrequency magnetron sputtering, microwave plasma enhanced chemical vapordeposition (MPECVD), pulsed laser deposition (PLD), laser ablation,spray deposition, spray pyrolysis, spray coating, or plasma spraying. 3.The apparatus of claim 1 wherein the chamber is configured to depositnanowire structures, nanotube structures, or nanobelt structures, or acombination of those structures.
 4. The apparatus of claim 1 wherein thechamber is configured to deposit Group III-IV semiconductor nanowires,zinc (Zn) or zinc oxide (ZnO) nanowires, nanobelts of semiconductingoxides of zinc, tin, indium, cadmium, and gallium, carbon nanotubes, orcarbon meso-structures.
 5. The apparatus of claim 1 further comprising avacuum source in fluid communication with the deposition chamber.
 6. Theapparatus of claim 1 further comprising a radiation source incommunication with the deposition chamber.
 7. The apparatus of claim 1further comprising a thermal source in communication with the depositionchamber.
 8. The apparatus of claim 1 further comprising an opticalsource in communication with the deposition chamber.
 9. A system forreel-to-reel apparatus for continuous manufacture of discreteelectrochemical cells in a stacked structure for batteries, the systemcomprising an apparatus comprising: a single deposition chambercomprising a first material source configured to deposit a firstmaterial, the first material source configured to deposit an anodematerial or a cathode material, the first material source being at leastone of a metal oxide source, a metal phosphate source, a lithium metalsource, or a lithium metal alloy source, and with a second materialsource configured to deposit a second material, the second materialsource being configured to deposit an electrolyte, the second materialsource being either a lithium phosphorous compound source, or apolymeric material source; a first gate comprising a first evacuationchamber in fluid communication with the single deposition chamber andconfigured to be maintained under a determined pressure similar to apressure within the single deposition chamber; a second gate comprisinga second evacuation chamber in fluid communication with the depositionchamber and configured to be maintained under the determined pressuresimilar to the pressure within the single deposition chamber; asubstrate for a battery device positioned between a first reel and asecond reel, configured to be movable from the first gate, through thesingle deposition chamber, and the second gate, and extending from thefirst gate, the single deposition chamber, and the second gate; and acontroller, in electronic communication with a non-transitory computerreadable medium, programmed to rotate the first reel and the second reelin alternating directions through the single deposition chamber and toprovide an instruction to deposit on the substrate an electrode materialfrom the first material derived from the first material source when thesubstrate is moved in a first direction, and then to deposit on theelectrode material an electrolyte material from the second materialderived from the second material source when the substrate is moved in asecond direction opposite to the first direction and thereafter todeposit on the electrolyte from a third material another electrode toform a single, discrete electrochemical cell; and the controller isprogrammed to rotate the reels in alternating directions and to instructthe single deposition chamber to deposit on the single, discreteelectrochemical cell other materials for manufacture of a plurality ofother electrochemical cells overlying the single, discreteelectrochemical cell; wherein the deposition of the first material isduring a first time period, and the deposition of the second materialsource is during a second time period subsequent to the first timeperiod, wherein the controller is programmed to form at least two otherdiscrete electrochemical cells in addition to the single, discreteelectrochemical cell, each discrete chemical cell being spaced apartfrom the other discrete electrochemical cells along a length of thesubstrate, wherein the controller is programmed to rotate the first reeland the second reel in alternating directions for a continuous build-upof a plurality of materials, including the first material, the secondmaterial, and the third material, for a manufacture of the plurality ofelectrochemical cells in the stacked configuration, and wherein thecontroller is programmed to rotate the first reel and the second reel inalternating directions to increase the spacing between each successivepair of electrochemical cells along the length of the substrate to forma coiled battery comprising the plurality of electrochemical cells inthe stacked configuration.
 10. The apparatus of claim 9 wherein thechamber is configured to perform deposition utilizing at least one or acombination of methods selected from evaporation, physical vapordeposition (PVD), chemical vapor deposition, sputtering, radio frequencymagnetron sputtering, microwave plasma enhanced chemical vapordeposition (MPECVD), pulsed laser deposition (PLD), laser ablation,spray deposition, spray pyrolysis, spray coating, or plasma spraying.11. The apparatus of claim 9 wherein the chamber is configured todeposit nanowire structures, nanotube structures, nanobelt structures,or a combination of those structures.
 12. The apparatus of claim 9wherein the chamber is configured to deposit at least one materialselected from Group III-IV semiconductor nanowires, zinc (Zn) or zincoxide (ZnO) nanowires, a semiconducting oxide of zinc, a semiconductingoxide of tin, a semiconducting oxide of indium, a semiconducting oxideof cadmium, a semiconducting oxide of gallium, carbon nanotubes, orcarbon meso-structures.
 13. The apparatus of claim 9 further comprisinga vacuum source in fluid communication with the deposition chamber. 14.The apparatus of claim 9 further comprising a radiation source incommunication with the deposition chamber.
 15. The apparatus of claim 9further comprising a thermal source in communication with the depositionchamber.
 16. The apparatus of claim 9 further comprising an opticalsource in communication with the deposition chamber.
 17. An apparatusfor deposition of electrochemical cells, the apparatus comprising: adeposition chamber comprising a first material source configured todeposit a first material, the first material source configured todeposit an anode material or a cathode material, the first materialsource comprising at least one of a metal oxide source, a metalphosphate source, a lithium metal source, or a lithium metal alloysource, and with a second material source configured to deposit a secondmaterial, the second material source being configured to deposit anelectrolyte, the second material source comprising a lithium phosphorouscompound source or a polymeric material source; a first gate comprisinga first evacuation chamber in fluid communication with the depositionchamber and configured to be maintained under gas and pressureconditions similar to conditions within the deposition chamber; a secondgate comprising a second evacuation chamber in fluid communication withthe deposition chamber and configured to be maintained under gas andpressure conditions similar to conditions within the deposition chamber;a substrate positioned between two reels and extending through the firstgate, the deposition chamber, and the second gate; and a controller, inelectronic communication with a non-transitory computer readable medium,programmed to rotate the reels in alternating directions through thedeposition chamber and to instruct the deposition chamber to deposit onthe substrate an electrode from the first material derived from thefirst material source when the substrate is moved in a first direction,and then to deposit on the electrode an electrolyte from the secondmaterial derived from the second material source when the substrate ismoved in a second direction opposite to the first direction andthereafter to deposit on the electrolyte from a third material anotherelectrode to form a single, discrete electrochemical cell; and thecontroller is programmed to continue to rotate the reels in alternatingdirections and to instruct the deposition chamber to deposit on thesingle, discrete, electrochemical cell other materials to form a stackedconfiguration comprising the single, discrete electrochemical cell andother, overlying electrochemical cells, wherein the controller isprogrammed to form at least two other discrete electrochemical cells inaddition to the single, discrete electrochemical cell, each discreteelectrochemical cell being spaced apart from the other electrochemicalcells along a length of the substrate, wherein the controller isprogrammed to rotate the first reel and the second reel in alternatingdirections to increase spacing between each successive pair of discreteelectrochemical cells along the length of the substrate to form a coiledbattery comprising the plurality of electrochemical cells in the stackedconfiguration, and wherein the first material source configured todeposit the first material is configured to deposit an anode or acathode, and the second material source configured to deposit the secondmaterial is configured to deposit an electrolyte.